1. Auger electrons is a failure analysis technique for analyzing the surface of a sample. Auger Electron Spectroscopy and Scanning Auger Microanalysis are two Auger Analysis techniques. These two techniques are generally used to determine the elemental composition at certain points on the surface of the sample. Ion sputtering is generally used to measure the concentration of the element as a function of sample depth. Auger depth can be used to determine the contaminant and its unknown location in the sample. It can also be used to analyze composition of oxide layers, detect Au-Al bond strength, and the like.

Second, transmission electron microscopy (TEM) TEM is generally used to analyze sample morphology (morhology), metallographic structure and sample composition analysis. The TEM provides a higher spatial resolution than the SEM system, achieving nanometer resolution, typically using an electron beam with an energy of 60-350 keV. Unlike TEMs that require excitation of secondary electrons or electron beams emitted from the surface of the sample, the TEM collects electrons that penetrate the sample. Like the SEM, the TEM uses an electron gun to generate an electron beam that is focused by the lens and aperture into a finer electron beam.

FTIR Spectroscopy (Fourier Transform Infrared) FTIR microscopy is a failure analysis technique that provides information about chemical bonding and the molecular structure of a material, whether it is organic or inorganic. Unknown materials that are commonly used to determine the surface of a sample are generally used as a supplement to EDX analysis.

The system works on the basis that the bonds and groups of bonds in different substances have their own fixed characteristic frequencies. Different molecules, when exposed to infrared radiation, absorb infrared light at a fixed frequency (ie, energy), which is determined by the nature of the molecule itself. The different frequencies of infrared light emitted and reflected by the sample are converted into a combination of many energy peaks. Finally, it is determined by the analysis of the spectral pattern obtained by FTIR.